Scanning Micromirror Platform Based on MEMS Technology for Medical Application
نویسندگان
چکیده
منابع مشابه
Scanning Micromirror Platform Based on MEMS Technology for Medical Application
This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanation...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2016
ISSN: 2072-666X
DOI: 10.3390/mi7020024